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LPCVD Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology (Research Reports Esprit, 1, Band 1)

Name: LPCVD Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology (Research Reports Esprit, 1, Band 1)
Brand: F.H.P.M. Habraken
SKU: 8950824

Brand : Springer, Binding : Taschenbuch, Edition : Softcover reprint of the original 1st ed. 1991, Label : Springer, Publisher : Springer, NumberOfItems : 1, medium : Taschenbuch, numberOfPages : 169, publicationDate : 1991-05-28, publishers : F.H.P.M. Habraken, ISBN : 3540539549

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LPCVD Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology (Research Reports Esprit, 1, Band 1)