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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms And Application To Ic Interconnect Technology

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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms And Application To Ic Interconnect Technology

Brand : Springer, Binding : Taschenbuch, Edition : Softcover reprint of the original 1st ed. 2002, Label : Springer, Publisher : Springer, medium : Taschenbuch, numberOfPages : 248, publicationDate : 2014-02-23, releaseDate : 2014-02-23, authors : Borst, Christopher Lyle, ISBN : 1461354242

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